diff --git a/drivers/iommu/intel/dmar.c b/drivers/iommu/intel/dmar.c
index 9be08b9400ee..f6cbe3f95c8d 100644
--- a/drivers/iommu/intel/dmar.c
+++ b/drivers/iommu/intel/dmar.c
@@ -1456,9 +1456,26 @@ void qi_flush_dev_iotlb_pasid(struct intel_iommu *iommu, u16 sid, u16 pfsid,
 	 * Max Invs Pending (MIP) is set to 0 for now until we have DIT in
 	 * ECAP.
 	 */
-	desc.qw1 |= addr & ~mask;
-	if (size_order)
+	if (addr & GENMASK_ULL(size_order + VTD_PAGE_SHIFT, 0))
+		pr_warn_ratelimited("Invalidate non-aligned address %llx, order %d\n",
+				    addr, size_order);
+
+	/* Take page address */
+	desc.qw1 = QI_DEV_EIOTLB_ADDR(addr);
+
+	if (size_order) {
+		/*
+		 * Existing 0s in address below size_order may be the least
+		 * significant bit, we must set them to 1s to avoid having
+		 * smaller size than desired.
+		 */
+		desc.qw1 |= GENMASK_ULL(size_order + VTD_PAGE_SHIFT - 1,
+					VTD_PAGE_SHIFT);
+		/* Clear size_order bit to indicate size */
+		desc.qw1 &= ~mask;
+		/* Set the S bit to indicate flushing more than 1 page */
 		desc.qw1 |= QI_DEV_EIOTLB_SIZE;
+	}
 
 	qi_submit_sync(iommu, &desc, 1, 0);
 }