diff --git a/arch/arm/boot/dts/at91sam9g25ek.dts b/arch/arm/boot/dts/at91sam9g25ek.dts
new file mode 100644
index 000000000000..e64eb932083b
--- /dev/null
+++ b/arch/arm/boot/dts/at91sam9g25ek.dts
@@ -0,0 +1,37 @@
+/*
+ * at91sam9g25ek.dts - Device Tree file for AT91SAM9G25-EK board
+ *
+ *  Copyright (C) 2012 Atmel,
+ *                2012 Nicolas Ferre <nicolas.ferre@atmel.com>
+ *
+ * Licensed under GPLv2 or later.
+ */
+/dts-v1/;
+/include/ "at91sam9x5.dtsi"
+/include/ "at91sam9x5cm.dtsi"
+
+/ {
+	model = "Atmel AT91SAM9G25-EK";
+	compatible = "atmel,at91sam9g25ek", "atmel,at91sam9x5ek", "atmel,at91sam9x5", "atmel,at91sam9";
+
+	chosen {
+		bootargs = "128M console=ttyS0,115200 mtdparts=atmel_nand:8M(bootstrap/uboot/kernel)ro,-(rootfs) root=/dev/mtdblock1 rw rootfstype=ubifs ubi.mtd=1 root=ubi0:rootfs";
+	};
+
+	ahb {
+		apb {
+			dbgu: serial@fffff200 {
+				status = "okay";
+			};
+
+			usart0: serial@f801c000 {
+				status = "okay";
+			};
+
+			macb0: ethernet@f802c000 {
+				phy-mode = "rmii";
+				status = "okay";
+			};
+		};
+	};
+};
diff --git a/arch/arm/boot/dts/at91sam9x5.dtsi b/arch/arm/boot/dts/at91sam9x5.dtsi
new file mode 100644
index 000000000000..e91391f50730
--- /dev/null
+++ b/arch/arm/boot/dts/at91sam9x5.dtsi
@@ -0,0 +1,172 @@
+/*
+ * at91sam9x5.dtsi - Device Tree Include file for AT91SAM9x5 family SoC
+ *                   applies to AT91SAM9G15, AT91SAM9G25, AT91SAM9G35,
+ *                   AT91SAM9X25, AT91SAM9X35 SoC
+ *
+ *  Copyright (C) 2012 Atmel,
+ *                2012 Nicolas Ferre <nicolas.ferre@atmel.com>
+ *
+ * Licensed under GPLv2 or later.
+ */
+
+/include/ "skeleton.dtsi"
+
+/ {
+	model = "Atmel AT91SAM9x5 family SoC";
+	compatible = "atmel,at91sam9x5";
+	interrupt-parent = <&aic>;
+
+	aliases {
+		serial0 = &dbgu;
+		serial1 = &usart0;
+		serial2 = &usart1;
+		serial3 = &usart2;
+		gpio0 = &pioA;
+		gpio1 = &pioB;
+		gpio2 = &pioC;
+		gpio3 = &pioD;
+		tcb0 = &tcb0;
+		tcb1 = &tcb1;
+	};
+	cpus {
+		cpu@0 {
+			compatible = "arm,arm926ejs";
+		};
+	};
+
+	memory@20000000 {
+		reg = <0x20000000 0x10000000>;
+	};
+
+	ahb {
+		compatible = "simple-bus";
+		#address-cells = <1>;
+		#size-cells = <1>;
+		ranges;
+
+		apb {
+			compatible = "simple-bus";
+			#address-cells = <1>;
+			#size-cells = <1>;
+			ranges;
+
+			aic: interrupt-controller@fffff000 {
+				#interrupt-cells = <2>;
+				compatible = "atmel,at91rm9200-aic";
+				interrupt-controller;
+				interrupt-parent;
+				reg = <0xfffff000 0x200>;
+			};
+
+			pit: timer@fffffe30 {
+				compatible = "atmel,at91sam9260-pit";
+				reg = <0xfffffe30 0xf>;
+				interrupts = <1 4>;
+			};
+
+			tcb0: timer@f8008000 {
+				compatible = "atmel,at91sam9x5-tcb";
+				reg = <0xf8008000 0x100>;
+				interrupts = <17 4>;
+			};
+
+			tcb1: timer@f800c000 {
+				compatible = "atmel,at91sam9x5-tcb";
+				reg = <0xf800c000 0x100>;
+				interrupts = <17 4>;
+			};
+
+			dma0: dma-controller@ffffec00 {
+				compatible = "atmel,at91sam9g45-dma";
+				reg = <0xffffec00 0x200>;
+				interrupts = <20 4>;
+			};
+
+			dma1: dma-controller@ffffee00 {
+				compatible = "atmel,at91sam9g45-dma";
+				reg = <0xffffee00 0x200>;
+				interrupts = <21 4>;
+			};
+
+			pioA: gpio@fffff400 {
+				compatible = "atmel,at91rm9200-gpio";
+				reg = <0xfffff400 0x100>;
+				interrupts = <2 4>;
+				#gpio-cells = <2>;
+				gpio-controller;
+			};
+
+			pioB: gpio@fffff600 {
+				compatible = "atmel,at91rm9200-gpio";
+				reg = <0xfffff600 0x100>;
+				interrupts = <2 4>;
+				#gpio-cells = <2>;
+				gpio-controller;
+			};
+
+			pioC: gpio@fffff800 {
+				compatible = "atmel,at91rm9200-gpio";
+				reg = <0xfffff800 0x100>;
+				interrupts = <3 4>;
+				#gpio-cells = <2>;
+				gpio-controller;
+			};
+
+			pioD: gpio@fffffa00 {
+				compatible = "atmel,at91rm9200-gpio";
+				reg = <0xfffffa00 0x100>;
+				interrupts = <3 4>;
+				#gpio-cells = <2>;
+				gpio-controller;
+			};
+
+			dbgu: serial@fffff200 {
+				compatible = "atmel,at91sam9260-usart";
+				reg = <0xfffff200 0x200>;
+				interrupts = <1 4>;
+				status = "disabled";
+			};
+
+			usart0: serial@f801c000 {
+				compatible = "atmel,at91sam9260-usart";
+				reg = <0xf801c000 0x200>;
+				interrupts = <5 4>;
+				atmel,use-dma-rx;
+				atmel,use-dma-tx;
+				status = "disabled";
+			};
+
+			usart1: serial@f8020000 {
+				compatible = "atmel,at91sam9260-usart";
+				reg = <0xf8020000 0x200>;
+				interrupts = <6 4>;
+				atmel,use-dma-rx;
+				atmel,use-dma-tx;
+				status = "disabled";
+			};
+
+			usart2: serial@f8024000 {
+				compatible = "atmel,at91sam9260-usart";
+				reg = <0xf8024000 0x200>;
+				interrupts = <7 4>;
+				atmel,use-dma-rx;
+				atmel,use-dma-tx;
+				status = "disabled";
+			};
+
+			macb0: ethernet@f802c000 {
+				compatible = "cdns,at32ap7000-macb", "cdns,macb";
+				reg = <0xf802c000 0x100>;
+				interrupts = <24 4>;
+				status = "disabled";
+			};
+
+			macb1: ethernet@f8030000 {
+				compatible = "cdns,at32ap7000-macb", "cdns,macb";
+				reg = <0xf8030000 0x100>;
+				interrupts = <27 4>;
+				status = "disabled";
+			};
+		};
+	};
+};
diff --git a/arch/arm/boot/dts/at91sam9x5cm.dtsi b/arch/arm/boot/dts/at91sam9x5cm.dtsi
new file mode 100644
index 000000000000..4ab5a77f4afc
--- /dev/null
+++ b/arch/arm/boot/dts/at91sam9x5cm.dtsi
@@ -0,0 +1,14 @@
+/*
+ * at91sam9x5cm.dtsi - Device Tree Include file for AT91SAM9x5 CPU Module
+ *
+ *  Copyright (C) 2012 Atmel,
+ *                2012 Nicolas Ferre <nicolas.ferre@atmel.com>
+ *
+ * Licensed under GPLv2 or later.
+ */
+
+/ {
+	memory@20000000 {
+		reg = <0x20000000 0x8000000>;
+	};
+};